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电沉积Mo和Mo-Co合金纳米线用于互联电阻的电阻率改性 Article
Jun Hwan Moon, Taesoon Kim, Youngmin Lee, Seunghyun Kim, Yanghee Kim, Jae-Pyoung Ahn, Jungwoo Choi, Hyuck Mo Lee, Young Keun Kim
《工程(英文)》 2024年 第32卷 第1期 页码 128-138 doi: 10.1016/j.eng.2023.07.017
Achieving historically anticipated improvement in the performance of integrated circuits is challenging, due to the increasing cost and complexity of the required technologies with each new generation. To overcome this limitation, the exploration and development of novel interconnect materials and processes are highly desirable in the microelectronics field. Molybdenum (Mo) is attracting attention as an advanced interconnect material due to its small resistivity size effect and high cohesive energy; however, effective processing methods for such materials have not been widely investigated. Here, we investigate the electrochemical behavior of ions in the confined nanopores that affect the electrical properties and microstructures of nanoscale Mo and Mo–Co alloys prepared via template-assisted electrodeposition. Additives in an electrolyte allow the deposition of extremely pure metal materials, due to their interaction with metal ions and nanopores. In this study, boric acid and tetrabutylammonium bisulfate (TBA) were added to an acetate bath to inhibit the hydrogen evolution reaction. TBA accelerated the reduction of Mo at the surface by inducing surface conduction on the nanopores. Metallic Mo nanowires with a 130 nm diameter synthesized through high-aspect-ratio nanopore engineering exhibited a resistivity of (63.0 ± 17.9) μΩ·cm. We also evaluated the resistivities of Mo–Co alloy nanowires at various compositions toward replacing irreducible conventional barrier/liner layers. An intermetallic compound formed at an Mo composition of 28.6 at%, the resistivity of the Mo–Co nanowire was (58.0 ± 10.6) μΩ·cm, indicating its superior electrical and adhesive properties in comparison with those of conventional barriers such as TaN and TiN. Furthermore, density functional theory and non-equilibrium Green’s function calculations confirmed that the vertical resistance of the via structure constructed from Mo-based materials was 21% lower than that of a conventional Cu/Ta/TaN structure.
关键词: Molybdenum Molybdenum–cobalt Interconnect Microstructure Electrodeposition Density functional theory
Vanadium and molybdenum concentrations in particulate from Palermo (Italy): analytical methods using
Diana AMORELLO,Santino ORECCHIO
《环境科学与工程前沿(英文)》 2015年 第9卷 第4期 页码 605-614 doi: 10.1007/s11783-014-0703-8
Xiaowei TENG, Hong YANG,
《化学科学与工程前沿(英文)》 2010年 第4卷 第1期 页码 45-51 doi: 10.1007/s11705-009-0308-0
关键词: spherical 2 4-pentanedionate adamantanecarboxylic acetylacetonate electrocatalytic
《化学科学与工程前沿(英文)》 2021年 第15卷 第6期 页码 1550-1560 doi: 10.1007/s11705-021-2104-4
关键词: cobalt embedment N-doped carbons covalent organic framework oxygen reduction Zn-air battery
《化学科学与工程前沿(英文)》 2023年 第17卷 第10期 页码 1440-1449 doi: 10.1007/s11705-023-2333-9
关键词: MXene supercapacitor cobalt doping structure characterization electrochemical performance
A potentiometric cobalt-based phosphate sensor based on screen-printing technology
Lei ZHU,Xiaohong ZHOU,Hanchang SHI
《环境科学与工程前沿(英文)》 2014年 第8卷 第6期 页码 945-951 doi: 10.1007/s11783-013-0615-z
关键词: phosphate cobalt screen-printing technology electroplate wastewater
《化学科学与工程前沿(英文)》 2023年 第17卷 第12期 页码 2114-2126 doi: 10.1007/s11705-023-2357-1
关键词: molybdenum disulfide nickel phyllosilicate epoxy resin flame retardancy
Mehraneh Ghavami, Mostafa Aghbolaghy, Jafar Soltan, Ning Chen
《化学科学与工程前沿(英文)》 2020年 第14卷 第6期 页码 937-947 doi: 10.1007/s11705-019-1900-6
关键词: ozone VOC manganese oxides cobalt oxides alumina support
Noble-metal-free cobalt hydroxide nanosheets for efficient electrocatalytic oxidation
Jie Lan, Daizong Qi, Jie Song, Peng Liu, Yi Liu, Yun-Xiang Pan
《化学科学与工程前沿(英文)》 2020年 第14卷 第6期 页码 948-955 doi: 10.1007/s11705-020-1920-2
关键词: electrocatalytic oxidation cobalt hydroxide nanosheet water glucose
Hasan Oliaei Torshizi, Ali Nakhaei Pour, Ali Mohammadi, Yahya Zamani, Seyed Mehdi Kamali Shahri
《化学科学与工程前沿(英文)》 2021年 第15卷 第2期 页码 299-309 doi: 10.1007/s11705-020-1925-x
关键词: cobalt catalyst cobalt particle size Fischer-Tropsch synthesis reduced graphene oxide supported catalyst
《化学科学与工程前沿(英文)》 2022年 第16卷 第9期 页码 1367-1376 doi: 10.1007/s11705-022-2153-3
关键词: metal phosphonate cobalt/nickel phosphide N-doped carbon oxygen electrochemistry Zn−air battery
《化学科学与工程前沿(英文)》 2023年 第17卷 第10期 页码 1593-1607 doi: 10.1007/s11705-023-2348-2
关键词: cellulose nanofibril aerogel nickel-cobalt layered double hydroxide polypyrrole nonenzymatic glucose sensor
Oxidative leaching kinetics of molybdenum-uranium ore in H
T. A. Lasheen, M. E. El-Ahmady, H. B. Hassib, A. S. Helal
《化学科学与工程前沿(英文)》 2013年 第7卷 第1期 页码 95-102 doi: 10.1007/s11705-013-1317-6
《环境科学与工程前沿(英文)》 2023年 第17卷 第8期 doi: 10.1007/s11783-023-1698-9
● Data acquisition and pre-processing for wastewater treatment were summarized.
关键词: Chemical oxygen demand Mining-beneficiation wastewater treatment Particle swarm optimization Support vector regression Artificial neural network
Jianxian ZENG, Junfeng LIU, Niandong HUANG,
《化学科学与工程前沿(英文)》 2010年 第4卷 第3期 页码 360-366 doi: 10.1007/s11705-009-0269-3
标题 作者 时间 类型 操作
电沉积Mo和Mo-Co合金纳米线用于互联电阻的电阻率改性
Jun Hwan Moon, Taesoon Kim, Youngmin Lee, Seunghyun Kim, Yanghee Kim, Jae-Pyoung Ahn, Jungwoo Choi, Hyuck Mo Lee, Young Keun Kim
期刊论文
Vanadium and molybdenum concentrations in particulate from Palermo (Italy): analytical methods using
Diana AMORELLO,Santino ORECCHIO
期刊论文
Synthesis and electrocatalytic property of cubic and spherical nanoparticles of cobalt platinum alloys
Xiaowei TENG, Hong YANG,
期刊论文
Cobalt nanoparticle decorated N-doped carbons derived from a cobalt covalent organic framework for oxygen
期刊论文
Enhanced electrochemical performance of CoNiS@TiCT electrode material through doping of cobalt element
期刊论文
A potentiometric cobalt-based phosphate sensor based on screen-printing technology
Lei ZHU,Xiaohong ZHOU,Hanchang SHI
期刊论文
Molybdenum disulfide@nickel phyllosilicate hybrid for improving the flame retardancy and wear resistance
期刊论文
Room temperature oxidation of acetone by ozone over alumina-supported manganese and cobalt mixed oxides
Mehraneh Ghavami, Mostafa Aghbolaghy, Jafar Soltan, Ning Chen
期刊论文
Noble-metal-free cobalt hydroxide nanosheets for efficient electrocatalytic oxidation
Jie Lan, Daizong Qi, Jie Song, Peng Liu, Yi Liu, Yun-Xiang Pan
期刊论文
Fischer-Tropsch synthesis by reduced graphene oxide nanosheets supported cobalt catalysts: Role of support
Hasan Oliaei Torshizi, Ali Nakhaei Pour, Ali Mohammadi, Yahya Zamani, Seyed Mehdi Kamali Shahri
期刊论文
Metal phosphonate-derived cobalt/nickel phosphide@N-doped carbon hybrids as efficient bifunctional oxygen
期刊论文
Hierarchically porous cellulose nanofibril aerogel decorated with polypyrrole and nickel-cobalt layered
期刊论文
Oxidative leaching kinetics of molybdenum-uranium ore in H
T. A. Lasheen, M. E. El-Ahmady, H. B. Hassib, A. S. Helal
期刊论文
Water quality prediction of copper-molybdenum mining-beneficiation wastewater based on the PSO-SVR model
期刊论文